Photo Mask Loader
Need
The customer faced a significant challenge: to develop and manufacture a completely new generation of automatic loaders for their mask writing machines. Here are the central aspects required for the project's success:
ROHS/REACH-compliant components: To adhere to environmental standards and minimize the use of harmful substances, a strict selection process of components and materials that were only ROHS/REACH compliant was necessary.
Material declaration for all parts: A complete and detailed material declaration for each individual component and part of the machine was necessary for traceability and to ensure that the materials met the requirements for material selection and safety.
Cleanroom classification: Since the machines were to be used in the electronics industry, a cleanroom-classified design was required.
Earthquake-proof construction: Considering potential natural disasters, it was necessary to design the machines robustly and securely to minimize damage and prevent loss of machine functionality.
Solution
The developed solution included:
Design and development of a machine series: A series of these automatic loaders was carefully developed to ensure compliance with the specified requirements and guidelines.
Manufacturing, assembly, and commissioning in series production: After the design phase, the project moved on to manufacturing, assembly, and commissioning of multiple units in a series production environment, allowing for efficient production in larger volumes.
Key Aspects Considered in the Design Work
Only ROHS/REACH-compliant parts: A rigorous selection process for components and materials was conducted to ensure compliance with environmental standards.
Material declaration for all parts: A detailed material declaration was established to document the use of each component and its compliance with the specified requirements.
Cleanroom classification: The machines were designed with the necessary technology and equipment to meet cleanroom classification requirements and use in such a sensitive environment.
The equipment consists of:
- Machine enclosure in accordance with the customer's design guidelines.
- Use of OMRON light curtains for safety purposes.
- HIWIN servos to ensure precise motion control.
Facts
| Customer | NDA |
|---|---|
| Industry | Electronics |
| Production Start | 2019 |
| Managed Product | Substrates for Photomasks |
| Product Size | 1400×1620 mm |
| Product Weight | Moderately Heavy |
| Cycle Time | Fast |
| Serial Number | A18081-01, A18081-02, A19021, A19040, A20046-01, A20046-02, A22025 |
Result
The result of this project is a technically advanced machine series that not only meets the technical requirements but also significantly complements the customer's machine portfolio. These machines have been successfully delivered in larger volumes to the electronics industry.
